Alcatel Micro Machining Systems, a leading supplier of deep silicon etching equipment for MEMS and 3D Semiconductors, announced that it has shipped an Advanced DRIE production tool to Touch Micro-system Technology (tMt) to start production of advanced MEMS devices including Micro-mirrors,
Alcatel Micro Machining Systems announced that it has received an order from STMicroelectronics SAS in Tours (ST) for its new AMS 4200 production tool for advanced device technology.
Alcatel selected Brooks Automation for its new DRIE/PECVD cluster tools